As semiconductors become microrefined/laminated, the production process becomes increasingly complex, and temperature control becomes increasingly important. In particular, even small temperature deviations and fluctuations can affect quality, so minimizing the temperature control range is critical.
As semiconductors become microrefined/laminated, the production process becomes increasingly complex, and temperature control becomes increasingly important. In particular, even small temperature deviations and fluctuations can affect quality, so minimizing the temperature control range is critical. In addition, due to the improvement of accuracy, the number of temperature control areas in the equipment is increasing, in order to ensure that the equipment footprint remains unchanged, it must be efficiently configured in the limited equipment space in the
control cabinet, taking into account production quality and space efficiency has become a major issue.
Automatic control of temperature fluctuations to ensure stable production quality
Use a high-performance temperature control unit (NX-HTC) with 10 times the previous resolution and external interference suppression to minimize temperature fluctuations.
Use external interference suppression to automatically adjust the amount of
operation for finer control.By integrating functions to make the shape slimmer, achieve a compact device distribution
A product line that integrates advanced temperature control with
multi-point equipment 
